氧化掉焦電薄膜感測器利用焦電效應，將溫度變化轉為焦電訊號。氧化掉焦電薄膜感測器之訊號響應為感測器優劣之重要指標，影響訊號響應主要因素為焦電薄膜品質及感測器結構設計。利用薄膜機械性質檢測、雙階段飛鍍技術、多層薄膜應力分析及感測器結構設計，優化氧化揖焦電感測器之整體性能。

Thin-film ZnO pyroelectric sensors use the pyroelectric effect to convert temperature variation to corresponding electrical signal. The quality of ZnO films and the structural design of pyroelectric sensors are key factors to determine the responsivity of ZnO pyroelectric sensors. The mechanical properties testing of thin films， the twostep sputtering process， the stress analysis of multilayer， and the structural design of pyroelectric sensors are used to optimize thin-film ZnO pyroelectric sensors.