本研究利用非平衡磁控濺鍍系統，濺鍍類鑽碳膜。研究改變底材直流功率頻率和底材偏壓對類鑽碳膜的磨潤性質的影響。實驗中鍍層被覆共分為二階段：第一階段，主要為探討改變直流功率頻率， 而第二階段為改變底材的偏壓對鍍層基本結構，機械性質與附著性的影響，並使用往復式磨耗試驗機在乾磨情形下，探討不同對磨材下鍍層磨潤性質。研究結果顯示:在點接觸模式下，對磨材為AISI 52100 與Al2O3 時，附著力較佳之110 kHz 鍍層抗磨耗特性較佳。而鍍膜被覆時的偏壓以42V 偏壓值為最佳，擁有較低摩擦係數與較高的抗磨耗性，可得到最佳鍍膜磨潤性能。

The diamond like carbon (DLC) coatings are deposited on substrates using a closed field unbalanced magnetron sputtering system with various pulsed-DC power frequencies and bias voltage of substrate respectively in the first and second stage. The tribological properties of the coatings are tested against different counterbodies under dry conditions using an oscillating friction and wear tester. The experimental results reveal that the coating with 110 kHz and 42V bias voltage sliding against AISI 52100 or Al2O3 ball, demonstrate particularly good tribological properties, namely a low wear depth, a low friction coefficient and a long lifetime.