裂環共振器為人造光學超穎材料最重要之基本結構之一,在邁向更高頻應用中,三維化的課題則是現階段所遭遇的最大困難點。本研究提出一項簡單的製程架構,結合微影術與乾式蝕刻技術,利用金屬應力自組法,可輕易地製作紅外波段之三維裂環共振器,並透過光譜量測及數值模擬分析,研究電磁波與元件交互作用所顯現之光學特性。
The split ring resonator is one of the most important meta-atom for constructing the artificial photonic metamaterials. For higher frequency applications, the most difficult part is to fabricate the three-dimensional structures. In this study, we demonstrate a simple strategy by utilizing metal-stress self-assembly method to fabricate infrared three-dimensional split ring resonators. This strategy is simply involved lithography and dry etching processes. The electromagnetic properties are characterized through both spectrum experiments and numerical simulations.