文章詳目資料

台北海洋技術學院學報

  • 加入收藏
  • 下載文章
篇名 鐵磁性金屬薄膜在半導體上的製程與磁性研究
卷期 8:1
並列篇名 The manufacturing process and magnetic properties of ferromagnetic metal films on semiconductor
作者 陳耀榮蔡志申
頁次 097-103
關鍵字 紅熒烯表面磁光科爾效應CobaltRubreneSMOKESilicon
出刊日期 201611

中文摘要

本研究中磁性材料選擇鈷,選用矽(100)當作基板。用射頻磁控濺鍍成長鈷及 蒸鍍成長紅熒烯,當作改變矽基板表面特性的介面層,在單晶矽(1〇〇)上成長鈷/4 nm紅熒烯/石夕(100)結構,配合鈷/石夕(100)系統的研究,探討紅熒烯加入後對表面與 磁性的影響,用原子力顯微鏡觀察表面形貌的變化,與磁光科爾效應的磁探測技 術。比較鈷/石夕(100)與鈷/4 nm紅熒烯/石夕(100)兩個系統,發現在鈷/石夕(100)系統中間 夾入4nm紅癸稀,成為钻/4nm紅癸稀/石夕(100)系統,紅癸稀會減少钻膜内部的缺 陷,導致矯頑力的下降,在此提出4 nm紅癸稀扮演化學中界面活性劑的角色,使 钻薄膜在磁特性表現更好。

英文摘要

The cobalt is chosen for magnetic material in this research, and silicon (100) uses regard as the base plate. Experiment this utilize the intersection of radio frequency and magnetism accuse of way plated to spatter grow up cobalt, and way plated to steam grow up red glimmering alkene, regard as the interface floor which changes silicon base plate surface characteristic, in mono-crystalline silicon (100) On grow up cobalt /red in 4 nm glimmering alkene / silicon (100) Structure, and then cooperate with early cobalt / silicon (100) in this laboratory The research of the system, canvassing and impact on surface and magnetism after redder glimmering alkene is joined,and the instrument will observe the change of the surface topography of samples with the atom strength microscope, survey technology with the magnetism and magnetism on effect of mere gram. And compare cobalt / silicon (100) at the same time in this research With cobalt / 4 nm red glimmering alkene / silicon (100) Two systems, find the different part is, in cobalt / silicon (100) Insert into 4 nm red glimmering alkene the middle the system, become cobalt / 4 nm red glimmering alkene / silicon (100) The system,red glimmering alkene will reduce the defect within the membrane of cobalt, result in rectifying the decline of stupid strength, we propose here 4 nm red glimmering alkene act the part of active pharmaceutical of chemical interface of China, make cobalt membrane do well in the magnetic characteristic.

相關文獻