篇名 | 基於低同調光源干涉術與定向機制的絕對角位移量測干涉儀 |
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卷期 | 13:3 |
並列篇名 | Absolute-angular-displacement measurement interferometer based on low-coherent light source interferometry and orienteering mechanism |
作者 | 林世聰 、 莊家瑋 、 林育信 |
頁次 | 125-130 |
關鍵字 | 角度干涉儀 、 低同調光源 、 定向機制 、 絕對角位移 、 angular interferometer 、 low-coherent light source 、 orienteering mechanism 、 absolute-angular-displacement |
出刊日期 | 201810 |
本研究提出一套基於低同調光源干涉術與定向機制的角度干涉儀,可用以量 測受測平台的絕對角位移。其中定向機制依無因次光強的變化判定受測平台的角 位移方向與大小,即時地命令測頭中的雙折射稜鏡反向位移,直到干涉光強到達 最低波谷值;此反向角位移的負值即受測平台的角位移。本論文將詳細介紹該干 涉儀的架構與量測原理、描述該干涉儀的實驗架設,及展示和討論該實驗架設的 實驗結果;實驗結果驗證本研究所提干涉儀的正確與可應用性。
This research developed an angular interferometer, which is based on low-coherent light source interferometry and orienteering mechanism, for absolute-ang -ular-displacement measurements. Where the orienteering mechanism estimates the rotation angle and direction of the object by inspecting the deviation of non-dimensiona -l intensity, it then instantly commands the birefringent prism of the probe to rotate back to the orientation where the interference intensity falls to its minimum value. The inverse of the back-rotation angle of the birefringent prism is the rotation angle of the object. This paper is to introduce the angular interferometer and orienteering mechanism in detail, describe the experimental setup for implementing the interferometer, and present and discuss the experimental results from the uses of the setup. The experiment -al results agree the validity and applicability of the interferometer.