固態氣體感測器常用來檢測易燃氣體與有毒氣體，隨其感測機制的不同具有不同的優缺點。舉例而言，觸媒燃燒式氣體感測器具有不受環境溫濕度影響的優點；固態電解質氣體感測器具有良好的選擇性、高導電率與靈敏度；半導體氧化物氣體感測器則具有靈敏度相對高、可偵測低濃度氣體、小型化與適合低價量產等優點。本文將針對以上幾種固態氣體感測器作介紹，另外也將選擇介紹幾種用於製備固態氣體感測器的材料製程技術。

Solid-state gas sensors are commonly used to detect flammable and toxic gases. Depending on the sensing mechanisms, the sensors possess different advantages and disadvantages. For example, catalytic combustion gas sensors are less likely to be affected by ambient temperature and humidity. Solid electrolytes gas sensors present good selectivity, high conductivity and sensitivity. Semiconducting oxide gas sensors have advantages such as high sensitivity, capability of detecting gas in low concentration, miniaturization, and capability of cost-effective, scaleup production. This article is intended to give a brief introduction of the above gas sensors together with materials and processes commonly used for preparing the solid-state gas sensors.