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篇名 應用全像干涉技術製作大面積二維與三維週期性結構
卷期 28:5=157
並列篇名 Fabrication of Large Area Two-and Three-Dimensional Periodic Structures by Holography Interference Technique
作者 賴玉蝶林建宏梁文評許佳振
頁次 65-72
出刊日期 200704

中文摘要

我們提出一種簡單和快速的光學干涉全像技術,可製備高品質大面積二維和三維週期性結構,此技術利用雙光束多重曝光干涉方法,藉由控制曝光劑量和每次曝光的轉動角度,可以得到很多新穎的三維週期性結構。比較特別的是,利用此方法所得到的三維週期性結構,其橫向與縱向的晶格常數非常接近,這與一般通用多光束干涉全像技術所得不同。另外,我們提出兩種新的技術,可以在光學干涉全像技術所得到的週期性結構上加入缺陷。

英文摘要

A simple and efficient optical interference method for fabricating high quality large area two- and three-dimensional (2D and 3D) periodic structures was demonstrated. Employing multi-exposure of two-beam interference technique, different types of periodic structures were created depending on the number of exposure and the rotation angle of the sample for each exposure. Three-exposure, in particular, resulted in different kinds of 3D structures, with close lattice constants in transverse and longitudinal directions, which is difficult to be obtained by the commonly used multi-beam interference technique. Furthermore, we proposed two methods to embed the defects to the periodic structures that fabricated by multi-exposure of two-beam interference technique.

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