掃描探針顯微鏡之相關應用近年來已累積相當可觀的數量，其中不乏光電、物理、材料、機
械、生命科學及化學等領域，可說是進入奈米科技的主要入門工具之一，其可以得到樣品表
面的微區不同材質的物理性質，如表面的軟硬、摩擦力差異、導電性分布、親疏水性、表面
電位、靜電力及電容變化等。本文主要是著重在環境控制下表面物性量測之應用，以期在不
同的溫度、濕度或真空中能夠得到額外的物性訊息(如玻璃轉化溫度Tg) 或是藉此提高量測
之解析度(如磁力、相位、形貌等)。

In recent years, there has been a great amount of published papers for the application of scanning
probe microscopy (SPM). These contain the field of photoelectric, physical, material, mechanical, life
science, chemical..., etc. Therefore SPM becomes one of the main tool to go into the world of
nanotechnology. We can get some physical properties such as soft/hard distribution, friction force
difference, distribution of conductivity, hydrophilic/hydrophobic property, surface potential,
electrostatic force, gradient of capacitance..., etc. from the sample surface by using SPM. This
paper emphasized the application of environmental control in order to enhance the resolution of
magnetic force, phase, topography..., or get additional information of material characterization
such as Tg point.