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篇名 生根在中研院物理所的掃描探針顯微術
卷期 26:4=144
並列篇名 Development of Scanning Probe Microscopy at the Institute of Physics in Academia Sinica
作者 黃英碩張嘉升洪紹剛陳彥甫胡恩德楊志文陳雅柔
頁次 18-27
出刊日期 200502

中文摘要

中央研究院物理研究所經過多年的努力,已成功開發出掃描穿隧顯微術、原子力顯微術及其
他相關奈米技術。本文將簡單回顧開發的歷史,並介紹這些儀器的主要架構與功能,此外,
也提供圖像與敘述作印證。目前我們正積極開發第二代商品化掃描探針顯微儀,也期望藉著
該技術之發展,能結合更多學界與業界之有志之士,將該顯微術之潛能發揮到極致,甚且衍
生出嶄新的技術與產業。

英文摘要

After many years of effort at the Institute of Physics in Academia Sinica, we have successfully
developed scanning tunneling microscopy, atomic force microscopy, and several other related
nanotechnologies. In this article, our development history is briefly reviewed, and the functions and
schematics of our instruments are presented. We also show several images taken by our microscopes
and provide discussions on them. Now we are actively developing our second-generation
commercial scanning probe microscopes. Through the development of these technologies, we hope
to cooperate with other scientists and engineers to broaden the current technologies to an unexplored
horizon, and to even bring forth new technologies and industries.

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