1980 年代初期發明出來的掃描穿隧顯微術，以及日後陸續發展出來的其他掃描探針顯微術
(SPM)，提供科學家一個嶄新的能力去觀察、量測、甚至操控奈米級的世界。SPM 有一獨特
的優點是，藉由選取適當的探針，可探討物質表面上奈米等級的物理及化學性質，目前已有
數十種不同的SPM 技術，而且新的技術仍不斷開發中。此外，有些原本為SPM 而發展出來
的技術，已有部分應用到其他用途上，例如高密度儲存元件及高靈敏度生化分子檢測。因
此，可以預見SPM 對奈米科技將有重大的衝擊。

The invention of scanning tunneling microscopy in early 1980’s and the subsequent development of
other scanning probe microscopies (SPMs) have provided scientists unprecedented capability to
image, to measure, and to manipulate the nano-world. One unique advantage of SPMs is that
different physical and chemical properties on surfaces can be studied at the nanometer scale by the
appropriate choice of probe tips. Currently there are tens of different SPMs, and many other new
probe technologies are under development. Besides, several technologies that were originally
developed for SPMs have been found to be very useful for other applications, such as high-density
storage drives and high-sensitivity bio-and-chemical sensors. Therefore, it can be expected that
SPMs will have great impact on the nanoscience research and nanotechnology.