為配合國內光電產業之蓬勃發展，儀器科技研究中心有益既有之傳統光學加工與精密光機元件、微光學元件以及非球面光學元件之加工與檢測技術能量上，於94年度引進五軸超精密鑽石車削輪磨機，以擴展完整的光學工程技術陣容，滿足多樣性之研發需求。本設備可進行單點鑽石車削與超精密輪磨，除了軸對稱之光學元件與模仁加工外，亦可進行自由曲面加工。而在超精密加工技術領域中最基本的就是加工設備，其次才是配合的加工技術。因此，本文針對超精密加工設備，以及單點鑽石車削與超精密輪磨技術分別介紹說明。

Instrument Technology Research Center (ITRC) has devoted to limited and diversified ultra-precision components fabrication for more than 30 years, and established various aspheric optics fabrication units, precision centering machines, and micro lens and diffractive optical element (DOE) machining devices in the past years. To match up the massive growth of the optical industrial in Taiwan, ITRC introduced a new 5-axis ultra-precision machine in 2005. This machine has both single point diamond turning (SPDT) and ultra-precision grinding capability, and could fabricate both rotational symmetric and 3D freeform components. This article is focused on the ultra-precision machine technology, and SPDT and ultra-precision grinding technologies.