隨著電子產業的蓬勃發展，濾波器為已成為不可或缺的電子元件，而共振器常被用來作為濾波器，本文將介紹共振器的演進，並呈現筆者研究團隊以標準CMOS 製程所製作的梳狀式可調變頻率微共振器與平板式高頻微機械共振器。內容包含共振器的分析模擬、作動原理，以及量測結果。梳狀式可調變頻率微共振器的Q 值可達500，共振器共振頻率約為4.8kHz，調變電壓在0－25 V 時，可調變率達6.8%。平板式高頻微機械共振器的共振頻率為39.5 MHz，Q 值高達806。

Filters become important electronic components as electronic industry develops rapidly. Resonators are often applied as filters. In this article, we present the development of resonators and describe two kinds of micro resonators, which are micromechanical tunable resonator and high frequency micromechanical resonator fabricated by our research team. The principle, simulation and experiment of the resonators will be investigated in this paper. Experiments show that the micromechanical tunable resonator has a resonant frequency of 4.8 kHz and a Q-factor of 500, and the tunable-range of resonant frequency is about 6.8% at the tuning voltage of 0-25 V. On the other hand, the high frequency micromechanical resonator has a resonant frequency of 39.5 MHz. and a Q-factor of 806.