多次諧波成像是一種建立在原子力顯微術輕敲模式下的表面材料性質量測技術，它能夠在掃描表面形貌的同時，同步擷取表面的黏彈性質影像。相較於其他技術，多次諧波成像具有非破壞性量測、即時、高解析度與接近定量等優點。藉由量測側向高頻諧波訊號，將頻域訊號轉為力曲線，再依此重組出彈性、黏滯力等表面性質影像，並利用特殊設計的探針來增加訊噪比。相較於另一種以輕敲模式為基礎的相位影像，多次諧波成像能在一樣解析度的情況下，提供黏彈性的定量量測結果，也不會因為不同的作用力而影響影像對比。

HarmoniX is one of surface material property measurement technology based upon tapping mode AFM. While scanning the surface topography, it captures elasticity and adhesion simultaneously. Comparing with other technology, HarmoniX has advantages of non-destructive, real time, high resolution and quantitative measurement. By measuring torsional multiple harmonics, the frequency-domain signals could be transformed into force curve signal, and the surface property mapping of elasticity and adhesion could be reconstructed. Special-designed probes are also used to increase the S/N ratio. Comparing with phase image, which is also based upon tapping mode AFM, HarmoniX provides quantitative result of viscoelasticity at the same resolution, and the image contrast remains the same while applying different measuring force.