台灣太陽光電產值已經名列全球第四，未來在帶動周邊設備與服務產業上，太陽光電產業被賦予高度期盼。檢測技術是太陽能產業中重要的一環，它兼具管控品質與搜尋製程參數之雙重角色。不過，相較於實驗室離線分析法，一般較少有工業用太陽電池檢測技術與規格對外揭露。因而本文由分析工業界生產矽晶太陽能電池時遭遇之問題為始，敘述當前工業界選擇一檢測技術的緣由與技術關鍵處。為便於說明，生產矽晶太陽能電池過程，檢測工作在此被分為四個區塊，分別是晶片初步篩檢、晶片蝕刻粗化前後篩檢、抗反射膜檢測及網印結果檢測。本文回顧這些檢測工作中所援用之技術原理、檢測標準，以及目前制訂中之檢測標準，以作為研究人員之參考。

The gross industrial output value of Taiwan from solar photovoltaic products has been the top 4 of the world rankings. The solar photovoltaic industry is expected to drive business opportunities on equipment and service industry in the future. The inspection technology plays two important roles in photovoltaic industry: controlling quality and exploring new recipes for solar cell production. However, compared to off-line analysis methods in laboratory, only a little industrial solar cell inspection technology and specification have been disclosed. Therefore,
this article starts by analyzing problems in producing silicon solar cells, and then explains the reasons and technical points for each selected inspection method. For simplifying explanation, the inspection processes are segmented into four groups. They are incoming wafer inspection, wet etching starting/final inspection, antireflection film
inspection, and printing result inspection. This article reviews their working principles, inspection standards and the prepared inspection standards for researchers’ reference.