本研究針對高分子材料的薄膜性質加以探討，所進行之實驗共使用三種不同單體 PF、MEH、DB高分子材料，各具三種不同厚度之薄膜，膜厚大約為幾十奈米至幾百奈米。經由奈米壓痕和奈米刮痕測試，從所獲得的數據，嘗試建立一理論模型來分析高分子薄膜之機械性質。由測試結果及理論模型，可知參數 γ 與材料種類有關，而模型中之指數係數 m則隨薄膜厚度而異。經由本研究所建構之理論模型，希望能更廣泛運用在其他高分子材料薄膜之性能研究。

This research is to study the thin-film properties of polymer material. Three dif-ferent monomers (PF, MEH and DB) are tested, with three different film thicknesses about several dozen to several hundred nano meters. Nano-indentation tests and na-no-scratch tests were conducted in this research. Attempts were made to establish a theoretical model to analyze the mechanical property the thin-film of polymer. From
the experimental results and theoretical analysis, it is concluded that parameter γ is re-lated to the category of material, while the index m in the model is related to the thick-ness of the thin-film. It would be very beneficial that the theoretical model established through this research could be more widely applied to other researches on thin films of polymer materials.