本文乃製作一以微機電技術為基礎之苯氣體感測器，其中以石英材料作為基材，並以白金製作指叉電極與微加熱器，且透過沉積氧化鎢薄膜做為氣體感測層。當環境空氣中帶有苯氣體時，會於加熱之氧化鎢感測層表面產生氧化反應，進而改變氧化鎢薄膜之導電特性，故可經白金指叉電極量測其阻值變化量。而苯氣體濃度可經所量測之阻值推算而得。本文之氧化鎢薄膜可由已最佳化之濺鍍參數進行沉積而得，並且當感測器之工作溫度於 300°C 時可獲得最佳之感測特性。由實驗數據顯示，本文之感測器不僅具有高靈敏度之特性 (9.86 % ppm-1)，更擁有快速的反應時間 (40 s) 與回復時間 (240 s)。

This study develops a MEMS-based benzene gas sensor consisting of a quartz substrate, a thin-film WO3 sensing layer, an integrated Pt micro-hotplate, and Pt inter-digitated electrodes (IDEs). When benzene is present in the atmosphere, oxidation oc-curs on the heated WO3 sensing layer. This causes a change in the electrical conductiv-ity of the WO3 film, and hence changes the resistance between the IDEs. The benzene
concentration is then computed from the change in the measured resistance. A specific orientation of the WO3 layer is obtained by optimizing the sputtering process parame-ters. It is found that the better sensitivity of the gas sensor is at a working temperature
of 300°C. At the working temperature, the experimental results show that the sensor has a high degree of sensitivity (9.86 % ppm-1
), a rapid response time (40 s), and a quick recovery time (240 s).