類鑽碳氮(CN(下標x)薄膜與類鑽碳薄膜(Diamond-like carbon, DLC)均具有高硬度，高耐磨耗及低摩擦係數等優越性質。本研究係利用離子束沉積法(Ion beam deposition, IBD)，沉積類鑽碳氮薄膜，探討不同厚?(1.5、2.0、2.5、3.0 nm)類鑽碳氮薄膜於腐蝕溶液中之耐蝕及耐磨耗腐蝕性質。利用X-光光電子能譜儀(XPS)證實類鑽碳氮薄膜的原子結構，而類鑽碳氮薄膜的厚度則使用穿透式電子顯微鏡(TEM)觀察其截面來量測。並以拉曼頻譜(Raman spectroscopy)分析類鑽碳氮薄膜特性。類鑽碳氮薄膜在1 M NaCl+1 M H2SO4水溶液中，以電化學動態極化量測其靜態腐蝕行為；磨耗腐蝕試驗在不同外加電位下，以塊對環(Block-on-ring)方式進行表面摩擦，摩擦環為燒結氧化鋁(Al2O3)陶瓷，試驗後再以掃描式電子顯微鏡(SEM)觀察其表面腐蝕與磨耗腐蝕形態。結果顯示類鑽碳氮薄膜均有優越之腐蝕保護性，除具有較貴性(noble)之腐蝕電位與較低的陽極電流密度外，而且所有類鑽碳氮薄膜腐蝕電流密度(icorr)隨著薄膜厚度的增加而減少。在磨耗腐蝕方面，類鑽碳氮薄膜也顯示優異的耐磨耗腐蝕性，並隨薄膜厚度的增加而增加；在不同外加電位下，呈現較少之磨耗重量損失。

Diamond-like carbon films posses high hardness, high wear resistance and low friction coefficient, and are widely used in mechanical, electronic and biomedical industries. The purpose of this study is to evaluate thickness effects of diamond-like carbon films containing nitrogen on their corrosion and wear-corrosion resistance in a mixture of 1M NaCl+1 M H2SO4 solution. This study uses IBD method to deposit different thickness (1.5, 2.0, 2.5 and 3.0 nm) of DLC films containing 60% content of nitrogen gas in a gas mixture of C?H?+60%N?. The thickness of the films was measures by transmission electron microscope (TEM). The atomic bonding structures of these DLC nitride films are analyzed by Raman spectrometer and X-ray photoelectron spectroscopy (XPS). Scanning electron microscope (SEM) was used to analyze the surface morphologies of the specimens after corrosion and wear-corrosion tests. The results showed that all the nitrogen containing DLC films possessed a well corrosion protection against the 5088 alloy substrate, and which increases with the film thickness. In the wear-corrosion tests using various applied potentials during wear in the same corrosive solution. The results further indicated that the wear-corrosion resistance of all the nitrogen containing DLC films exhibited the same beneficial effect as corrosion protection, and the wear-corrosion loss decreasing with increasing film thickness.