本文主要介紹薄膜式微結構之金屬轉印模具開發，其具有可重複使用、更換模仁容易、成本低等優點，可協助廠商進行微結構批量生產，以提升產業利用價值。本研究結合黃光微影、電鑄及研磨等三項製程技術，成功開發出薄膜式微圓柱結構之金屬模仁。本金屬模仁利用精密電鑄技術，由鎳鈷合金沉積於光阻模板中，經脫模後黏貼於平板所構成，其具有良好之硬度、強度與韌度特性，足以承受重複使用所需之結構強度，可大幅提升薄膜式金屬模具之耐用性。此外，本研究也藉由滾輪輔助的貼片機制，使模座與薄膜式鎳鈷模仁兩者界面間具有較佳之緊密性與平整性。

In this paper, we focus on the development of membrane-typed metal mould with microstructures for imprinting. This mould has several benefits including reusable, easy replaceable core, and low cost that strongly improves industrial values in microstructure mass production. Photolithography, electroforming, and grinding techniques have been integrated in order to develop the membrane-typed metal mould in this research. It has been proven that the metal mould of micro pillars could be successfully fabricated. This metal mould was fabricated by precision electroforming technology that Ni-Co alloy was deposited on a photoresist mould, and further peeled off to attach onto a level mould. The hardness, stiffness and toughness of the Ni-Co alloy material core structure were sufficient and strong enough for reusable duration. The durability of this membrane-typed metal mould has been greatly enhanced. Furthermore, by applying roller assisted attaching mechanism, the interface between the mould and Ni-Co alloy core became more inseparable and flat.