掃描電容顯微術可偵測材料表面的微分電容訊號並將其成像，讓研究人員直接取得材料的電性分布資訊，除了被廣泛應用於載子濃度分布與電性接面的觀察，亦延伸出許多特殊的應用。然而隨著製程技術的快速發展，掃描電容顯微術亦已面臨幾項關鍵的挑戰，例如高空間解析度、高訊號靈敏度與定量化分析等要求，有愈來愈多的實驗證據指出，同時提高空間解析度與訊號靈敏度是有可能達成的。最近的研究結果顯示高靈敏度的掃描電容顯微術不但可以深入觀察載子濃度的微小變異，也可以用於深入研究摻雜的活化行為。本文將從四個不同的面向探討影響掃描電容顯微術訊號靈敏度的因素，包括系統架構、量測環境、試片製備以及導電探針，期望所提供的資訊能對產學界有所助益。

Scanning capacitance microscopy (SCM) can directly provide electrical properties of materials by detecting and imaging the differential capacitance signals on a material surface. In addition to the applications on the observations of carrier concentration distribution and electrical junctions, there are many extended applications for special topics. However, with the quick development of device processes SCM has also faced challenges such as high sensitivity,high spatial resolution and quantitative analysis. More and more experimental evidences suggested that it is possible to enhance both sensitivity and spatial resolution. Recently, experimental results indicated that high-sensitivity SCM can be applied to observe and to investigate not only the tiny variations of carrier concentration but also dopant activation behaviors in depth. In this article, we introduce the factors influencing the signal sensitivity of SCM, including system structure, experimental environment, specimen preparation and conductive probes. It is expected that the information provided in this article is helpful and useful for both academic and industrial fields.