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中文摘要
新世代的矽漂移能量分散式 X 光譜儀 (SDD EDS) 已對電子顯微鏡的微分析產生重大的變革，SDD EDS 具備低雜訊及高計數率的特性，提升了分析的空間解析度，近常溫下即可工作的優點，解決了添加液氮的困擾，大幅提高分析的效率及品質。
英文摘要
A revolution in electron-microscopic micro-analysis is made by silicon drift detector EDS. With the advantage of low noise and high count rates, SDD improve the spatial resolution of analysis. Working at near room temperature,liquid nitrogen is no more necessary. This has significantly improved the efficiency and quality in analysis.