銅銦鎵硒 (CIGS) 薄膜太陽能電池具有低成本、重量輕、可撓曲與壽命長等特點，故受到相當的矚目。國家奈米元件實驗室 (NDL) 擁有多腔體濺鍍研發系統及高精準度蒸鍍系統，可以在玻璃基板上成長高品質p-型 CIGS 薄膜。NDL 已建立完整之 CIGS 太陽能電池製程技術，包括以共蒸鍍方式製作之無鎘高效率CIGS 太陽能電池，其轉換效率可達 14%，CIGS 可撓式太陽能電池亦達 6%；而具大面積量產潛力之濺鍍／硒化法無毒 CIGS 太陽能電池轉換效率亦達 6.4%。

Copper indium gallium selenide (CIGS) thin film solar cells attracted a lot of attention due to the low-cost, light weight, flexible, long life and other features and advantages. National Nano Laboratory (NDL) possess G1 size (30 × 40 cm2) continues sputtering system and high precise co-evaporation deposition system that can deposit high-quality p-type CIGS thin film on glass. NDL has established the manufacturing technology of CIGS solar cells, included high-efficiency Cd-free CIGS solar cell with conversion efficiency of 14% and CIGS flexible solar cell with conversion efficiency of 6% both by co-evaporation method, and non-toxic CIGS solar cell with mass production possibility with conversion efficiency of 6.4% by sputtering/selenization methods