The aim of this paper is to develop a innovative inspection system for
present emerging LED (Light Emitting Diode) photoelectric industry. To
cope with the processing size of next generation dwindles, the gear of the
inspection equipment in ultra precision and fast inspection specifications
will become one of the important research keys. This paper presents a
machine vision to check LED micro-structure by embedded piezo probing
stage together with planar linear motor. Implemented vision servo is used
for feedback control on positioning and illuminating check. Ultra precision and fast positioning for searching the LED Pad/Die is achieved by using the features of piezoelectric actuator (PEA) and attractiveness of flat size in mechanical structure. Such piezo-actuated probing stage is controlled by using feed-forward neural network (FFNN) learning algorithm to compensate the nonlinear and hysteresis properties of piezoelectricity.Experimental results show each LED Pad/Die can be finished lighting within the rate of 4 pieces per second of one probe. This work validates a new inspection machine structure and demonstrates the feasibility on future multi probes for next manufacturing in lower dimensions.