The thin-disc piezoceramic-driving ultrasonic actuator dedicated to a
stepping ultrasonic motor is proposed. The mechanical hysteresis and
dead-zone phenomena are automatically compensated by a closed loop servo control, i.e. Fuzzy Sliding-Mode Control (FSMC), for position tracking. The controller design of FSMC has syncretized the fuzzy reasoning and sliding mode control with robust stability and disturbance rejection based on the verification via the trajectories of stair-up-down stepping square waves. Experimental results show that the proposed FSMC possesses the outstanding tracking and positioning capabilities.