本論文介紹一即時控制的閉迴路奈米定位系統，定位系統由具位移放大機構之撓性奈米定位平台、壓電致動器、電容式位移感測器、NI cRIO9074 控制模組等組成。本研究利用對稱式橋型位移放大機構設計，以ANSYS 有限元素分析軟體進行設計上的靜態及動態分析，並完成局部尺寸最佳化的設計，系統以LabVIEW 程式作定位系統之整合控制。實驗結果顯示，奈米定位系統行程可達119 μm，三軸之最大角度誤差為Z 軸的4.9〞。此定位平台經測試後，在以NI cRIO9074 FPGA 晶片燒入下所建立的閉迴路PID 控制系統，步階定位解析能力可達2 nm，及斜坡追蹤速度為5000 nm/s。

This paper describes the research on nano-positioning flexure stage by a
symmetric bridge magnification mechanism and a FPGA of NI cRIO9074 closed loop system. The developed system mainly consists of a piezoelectric actuator, a bridge magnification mechanism, a double flexure spring structure analyzed by the FEM software ANSYS, a capacitive sensor, and embedded NI cRIO-9074 real-time control system with FPGA chip. A bridge magnification mechanism has been designed to enlarge the travel of PZT actuator. And a LabVIEW program was developed to construct the PID closed-loop control for the positioning system. After the optimization analysis for the displacement, stress, and natural frequency by ANSYS software, the
dimensions of the flexure stage have been determined. The test results show the micro-/nano-positioning system with a NI cRIO-9074 FPGA and symmetric bridge mechanism can achieve a travel range of 119 μm, step positioning resolution of 2 nm, tracing speed of 5000 nm/s, and maximum Yaw error of 4.9 arc-seconds, respectively.