本文探討閉式靜壓閉式平面靜壓軸承使用薄膜節流時，其油腔、位移率以及節流器等設計參數之影響特性，使用流阻網路法建立各油腔的流量平衡方程式，聯立求解前述之方程式，得各油腔的壓力比，進而計算其承載、剛度係數與流量，探討可調整補償設計之薄膜節流參數在不同的工作台位移率時，對於承載能力、流量及剛度的影響，並且以最大剛度為目標，得到無限大剛度對應的擇優化設計參數，並且避免發生負剛度的設計參數。分析結果顯示，使用毛細管節流器，有一臨界節流參數值，使靜壓滑軌獲得大的承載力及剛度，然而，使用薄膜節流器，在特定範圍之節流參數與薄膜順從係數搭配使用，會有無限大剛度。整體而言，使用薄膜節流器之靜壓滑軌，其性能優於使用毛細管節流器的靜壓滑軌，在特定範圍之節流參數與薄膜順從係數搭配使用，會有無限大剛度。

This thesis investigates the influence of design parameters on a closed-planar-type hydrostatic bearing with single-action membrane restrictions. The important design parameters including membrane compliance coefficient and restriction parameters. The resistance network method is used to establish the flow continuity equations for all recesses. Solving these equations can obtain the pressure ratio of all recesses. The load capability, flow rate and static stiffness coefficient can be obtained by calculations. The active compensation design of restrictive parameters for single-action membrane is proposed. The influence of design parameters on the load capability, flow rate and static stiffness with varied working table speed is investigated. The optimum design parameters subject to maximum static stiffness can be obtained by the proposed adjustable compensation design method of iterative finding better design parameters subject to infinity static stiffness, and this method can avoid the unavailable negative static stiffness solutions. The analysis results show the optimum design parameters subject to infinite static stiffness can be obtained, and working with proper membrane compliance can provide theoretical infinity static stiffness. The hydrostatic bearing with capillary restrictors can promote the load capability and static stiffness by proper design of restrictor coefficients for recesses.