本實驗利用鎢燈絲加熱電流於非平衡磁控濺鍍系統[1]，解離乙炔、甲烷氣體，濺鍍固體碳靶及鈦靶，被覆含鈦氫類鑽碳膜。主要目的為研究改變熱燈絲電流(9A-17A)，增加碳氫解離率對於含鈦氫類鑽碳膜的磨潤性質改善。鍍膜厚度會隨著鎢燈絲加熱電流上升而增加：而改變加熱電流值，則會改變鍍膜組織，經Raman spectroscopy及X-ray Diffraction (XRD)分析發現鎢燈絲加熱電流上升，結晶性較佳。經由奈米硬度量測隨著鎢燈絲電流上升鍍層硬度值上升，NIT% (Welestic/Wtotal)回彈能量比上升。Schwingung Reibung and Versch liess (SRV)磨耗試驗證實電流值17A時表現優於其他鍍層，適當的加熱電流解離碳氫氣體可以增加濺鍍率，提升材料結晶性質，改善鍍膜抗磨耗性，提升材料的使用壽命。

Diamond-like Carbon (DLC) coatings were deposited with a hot tungsten filament unbalanced magnetron sputtering system (UBMS) using a mixed acetylene/methane as the precursor. Three carbon cathodes and one titanium cathode were used as the solid targets. In this experiment we evaluated the tribological properties of DLC coating with various current of the hot tungsten filament from 9A to 17A.The cross-section morphology was observed by field emission scanning electron microscopy (FE-SEM). Raman spectroscopy and X-ray diffraction (XRD) were employed to analysis the I(D)/I(G) ratio and microstructure properties, respectively. The Nano-indentation tester was used to measure the mechanical properties (Nano-hardness, NIT%) of the DLC coatingsFurthermore, the wearl tests were using a Schwingung Reibung and Versch liess (SRV) reciprocating friction tester under no lubricant condition. As the hot tungsten filament current was increased, the I(D)/I(G) ratio was decreased. With the increase of hot tungsten filament current, the deposition rate of the coating film increase. At the appropriate hot tungsten filament current is suitable for improving the microstructure properties of the DLC films, the tribological properties of the films were also improved.