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篇名 原子層沉積製程技術於奈米觸媒應用
卷期 33:3=185
並列篇名 Applications of Atomic Layer Deposition on Fabrication of Nano-Catalysts
作者 柯志忠王致傑薛仰志彭宗平
頁次 012-022
出刊日期 201112

中文摘要

隨著天然資源耗竭與過度工業化造成全球暖化加劇,開發高轉換效能燃料電池與再生能源成為人類能否持續發展之重要課題,本研究提出利用原子層沉積 (atomic layer deposition, ALD) 技術製作奈米觸媒,應用於質子交換膜燃料電池與光催化反應及水解產氫。ALD 技術具極佳鍍膜表面覆蓋率及厚度控制,在奈米材料領域有極大吸引力,本研究團隊突破 ALD 用來製備薄膜之傳統概念,製作燃料電池所需 Pt 奈米顆粒觸媒,並以僅為商用電極 Pt 擔載量之 1/30 即可獲得相近之燃料電池特性,有利於未來燃料電池商品化。此外,本團隊亦利用奈米模板製作 TiO2 奈米管陣列,並獲得極佳之光催化特性,而初步研究亦顯示 TiO2奈米管具有良好之水解產氫效能。

英文摘要

Developments of high conversion-effi ciency fuel cell and renewable energy are important to solve the problemsarisen from the fast consumption of natural resources and global warming due to industrialization. In this study,atomic layer deposition (ALD) is proposed to fabricate nano-catalysts for proton exchange membrane fuel cell(PEMFC), photocatalysis and water splitting for hydrogen generation. ALD offers good coating conformity overcomplicated substrates with atomic scale thickness control. Platinum nanoparticles prepared by ALD were usedas the catalyst for PEMFC. Compared with commercial electrode, only one thirtieth amount of platinum loadingcould achieve similar performance of PEMFC. The reduction of platinum loading can enable and accelerate thecommercialization of PEMFC. Besides, TiO2 nanotubes prepared by using ALD technique and anodized aluminumoxide template have excellent performance of photocatalysis. Preliminary study also shows that the TiO2 nanotubescan be a good catalyst of water splitting to generate hydrogen with the aid of solar energy.

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