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中文摘要
本文簡述國家實驗室在真空與薄膜技術領域具多樣性及差異化之研發規劃，以妥適整合資源，與學術界互補合作，並期共同建立我國自主性真空技術平台。
英文摘要
In this article, we would like to outline the developments of diversifi ed vacuum and thin fi lm technologies with great differentiation in ITRC, NARL. Looking forward to being the platform of vacuum technology in Taiwan, ITRC has the obligation to appropriately integrate the process capability and instrument resources, and collaborate with academia and industry.