本文以卡賽格林反射式光學系統之次反射鏡為研究主題，結合拋光與大口徑凸面非球面鏡檢測流程，開發更高效率的大口徑非球面鏡拋光製程，並據以研究拋光參數及檢測系統誤差對拋光與量測結果之影響。針對口徑 ψ160mm 凸面雙曲面非球面鏡，以傳統研磨拋光法對成形後最近似球面鏡片進行預拋光，再以機械手臂式 CNC 數控拋光設備執行鏡片曲面非球面化拋光及最終的修正拋光。拋光過程中利用高精度表面輪廓儀進行二維曲面形狀精度量測，確認非球面化拋光之形狀修正程度，最後以雷射干涉儀搭配電腦全像片取得三維表面形狀誤差，依據所量測到的形狀誤差，經由拋光機進行最後之修正拋光。本研究以所建立的大口徑非球面鏡拋光製程及檢測技術，完成形狀誤差 P-V 0.15 μm、RMS 17.9 nm 之非球面鏡製作。

In this study, we develop more efficient polishing processes and build inspection procedure for large convexhyperbolic mirror of Cassegrain optical system. We also investigate the effects of polishing parameters andmetrology system errors during fabrication processes. The polishing process combines the techniques ofconventional lapping and CNC polishing. The inspection procedure was carried out by using phase shiftinterferometer with CGH. In this study, we present an integration process of aspherical surface inspection andcorrection polishing. Based on this integration process, a ψ160 mm convex mirror with hyperbolic surface wascompleted. The form error of the mirror was converged to 0.15 μm P-V, 17.9 nm RMS.