本文介紹一種場感測探針的製備技術與應用。利用原子力顯微鏡的系統架構搭配電化學反應機制，可在探針尖端形成奈米金屬球團，同時可藉由改變電解液的配方在針尖製作不同金屬的奈米球團，此一探針工程技術可以製作出直徑約 15 奈米的奈米球團。探針尖端的奈米球團可以有效降低雜散場效應對量測訊號的影響，增加場感測量測時的空間解析度。另外，實驗結果也發現，對探針尖端的奈米球團進行雷射退火，可以使量測訊號增強並獲得更佳的影像品質。

This article reports on the fabrication of fi eld-sensitive probes and the related applications. Using an atomic forcemicroscope combined with electrochemical reaction mechanism, a metallic nano-cluster can be formed at the tipapex. The recipe of the electrolyte solution determined the material of the metallic nano-clusters. Using this probeengineering technique, one can fabricate a metallic nano-cluster with a diameter of about 15 nm. The metallic nanoclustercould suppress the stray field effect and improve the spatial resolution of field-sensitive scanning probemicroscopy (FS-SPM). Furthermore, experimental results revealed that laser annealing following the process of themetallic nano-cluster tip can enhance the signals and improve the image quality of FS-SPM.