氮碳化鋯（zirconium carbon nitride, ZrCN）鍍膜具有高硬度、低摩擦係數、高耐磨耗與腐蝕等優點。由於氮碳化鋯鍍膜的表面粗糙度與刀具的耐磨耗與抗腐蝕有關，因此於刀具表面改質製程中，量測刀具鍍膜之表面粗糙度為重要之研究方向。傳統量測刀具鍍膜表面粗糙的值方法為使用原子力顯微鏡（atomic force microscopy, AFM），然而此一方法之缺點為量測前之前置作業（lead time）時間長以及量測速度慢。為了解決此問題，本研究發展出一套價格便宜之刀具鍍膜表面粗糙度快速光學檢測系統。研究結果顯示，檢測角度20°為檢測氮碳化鋯鍍膜表面粗糙度之最佳檢測角度，y=-39.168x + 395.75為預測氮碳化鋯鍍膜表面粗糙度之最佳趨勢方程式，氮碳化鋯鍍膜之表面粗糙度值（y），可以藉由數位電錶所接收到直流電壓平均值（x）快速計算出，檢測時間節省效率高達93.33%，檢測最大誤差率可控制在12.37%之內。

Zirconium carbon nitride (ZrCN) hard films own high hardness, lower friction coefficient, higher wear and corrosion resistance. Investigations on the surface roughness of ZrCN hard films become an important issue because the surface roughness of ZrCN hard films is widely believed to be related to its characteristics of wear and corrosion resistances. This paper presents a low-cost optical inspection system for rapid surface roughness measurements of ZrCN hard films. The incident angle of 20° is found to be a good candidate for predicting the surface roughness of ZrCN hard films. Surface roughness, y, of ZrCN hard films can be determined rapidly from the average value of the reflected direct current voltage, x, using the developed optical system based on the trend equation of y = -39.168x + 395.75. The measurement results are in good agreement with the result s of white-light interferometry measurements. The deviation between both approaches is less than 12.37%. The savings in measurement time of the surface roughness of ZrCN hard films is up to 93.33%.