PeakForce Tapping 透過探針量測行為的改變，改善了傳統 AFM 量測模式上的不足。本文將介紹其既可保有輕敲式低側向力的優勢，又可以實現如接觸式般直接以即時力量作為線性回饋控制，實現了快速高解析機械性質的分布量測，以及自動回饋優化之 AFM 量測，並可相容於傳統 C-AFM 電流量測與 KPFM 電位量測，使得高品質之形貌、電性與機械性質得以同一時間取得，開創了新的奈米科研與應用領域。

Using PeakForce Tapping could improve the drawback of the traditional AFM technique. In this article, we will explain how PeakForce tapping provides not only rapid quantitative nano-mechanics mapping but also automated feedback optimization of AFM imaging. This new technique is compatible with C-AFM and KPFM, and gains both of mechanics and electrical information in high spatial resolution simultaneously.