本研究研製一兩端固定之懸臂樑式壓電真空壓力感測元件，此一兩端固定之壓電樑由一層壓電材料層(PZT) 與基板層 (銅) 組成。兩對電極分別置於懸臂樑的兩端，其中一對電極作激盪懸臂樑產生共振之用，另一對電極作汲取振動能量轉換回電訊號之用。由實驗結果得知，壓力感測元件量測範圍為 6.5x10-6－760 Torr，不同的真空壓力氣體黏滯性所產生的阻力不同，懸臂樑擺動的電壓輸出便會不同。實驗結果得知，感測器輸出電壓與氣體阻尼成反比，可直接由電壓輸出值求得真空壓力。

A clamped-clamped beam type piezoelectric vacuum pressure sensing element was developed in this research. The clamped-clamped piezoelectric beam is composed of a PZT layer and a copper substrate. Two pairs of electrodes are set near both ends. Input voltage was applied to one pair of electrodes to vibrate piezoelectric beam and output voltage was measured at the other pair of electrodes. Experimental results showed that developed pressure sensor has a wide range from 6.5 106 to 760 Torr. Because the viscous forces on piezoelectric beam vary at different air pressure, the vibration of beam depends on vacuum pressure. Experimental results showed that output voltages of piezoelectric sensors were mverse proportional to gas damping ratio. Vacuum pressures were estimated from output voltage.