本研究提出一個製造繞射光學元件之精密複合快速模具製作技術。實驗結果發現，快速模具技術之製程轉寫率可達92.5%，微熱壓印製程之轉寫率可達95.1%。精密複合快速模具技術不但能夠節省模具製作成本，而且還可以提升模具的強度。如果與傳統快速模具製程相互比較，複合快速模具技術可以節省模具製作成本約60.4%。

This study demonstrated a manufacturing technology of the precision hybrid rapid tooling for manufacturing the diffractive optical element (DOE). The transcription rate in the rapid tooling manufacturing process is about 92.5%. The transcription rate in the embossed part is about 95.1% in the micro hot embossing molding. Precision hybrid rapid tooling technology not only reduces the fabrication cost of rapid tooling but also has higher mold strength. In comparison with conventional method for fabricating a pair of rapid tooling of a new DOE, a cost reduction of 60.4% can be achieved using a hybrid rapid tooling technology.