本研究主要目的是在發展一三次元接觸式掃描探頭。在機構設計上，Z 軸系統利用薄彈片之特性達到 Z 軸垂直移動。XY 軸系統採用微細樑之設計，針對所選擇特定接觸力來設計微細樑的長、寬、厚度與彈片的相關尺寸，並在結構中心安裝一頂針，以抑制 Z 軸位移誤差，達成整體三自由度之特色。光路設計選用雷射二極體、一維 PSD 與二維 PSD 作為感測元件使用，經由感測器記錄此位移量或角度偏擺量，再與三軸定位平台作座標定位，便能得到待測物的尺寸與三維形貌。經實驗證實後，X/Y/Z 軸具有±1mm×±1 mm×1 mm 的量測範圍，不確定度為0.7μm，X/Y/Z方向的接觸力分別為 0.26 N/mm、0.26 N/mm 與0.4 N/mm。

This study develops a three dimensional scanning touch probe. In the mechanism, the Z-axis system achieves itsvertical movement by taking advantage of the characteristics of leaf springs. For the design of the XY-axis system,the length, width and thickness of a micro beam and the relevant size of a spring are designed to meet specificcontact force. A live center is installed in the center of the structure to inhibit the Z-axis displacement error, so asto achieve the characteristics of three degrees of freedom. In the optical path design, a laser diode, a single-axisPSD (Position Sensor Detector) and a two-axis PSD are adopted as sensing components, then will be able to obtainthe size and profile of the workpiece. Based on the validation of experiments, the measuring ranges in the X, Y andZ-axis of the scanning touch probe are ±1 mm ×±1 mm ×1 mm and an uncertainty of 0.7 μ m, while the probecontact force in the X, Y and Z-axis are about 0.26 N/mm, 0.26 N/mm, 0.4 N/mm, respectively.