本研究團隊開發出一套現代子孔徑接合量測技術，主要利用電動平台上的機械震動來達到量測表面之形變量之目的。當干涉儀連續擷取干涉條紋時，待測光學元件會對著本身的對稱軸旋轉。此設計利用同步旋轉掃描系統以及非均勻相移演算法，同時增進量測系統的擷取速度與量測能力以及子孔徑位置的準確性。經實際測試之後，其重疊部分之方均根誤差值只有 0.0037 個波長 (wave)，此結果顯示出此量測技術之可行性。

A novel subaperture stitching interferometric method is developed to test the surface deformation of the lens byutilizing the mechanical vibrations from a motorized stage. The tested optics is rotated against its symmetrical axisduring the interferogram acquisition. The measurement throughput and the subaperture positioning accuracy areimproved simultaneously by adopting both the synchronous rotational scanning mechanism and the non-uniformphase shifting algorithm. The experimental measurement shows the stitched phase RMS error of 0.0037 wavesproving the feasibility of the proposed method.