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技術學刊 EIScopus

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篇名 雙軸液靜壓車床之精度與加工特性
卷期 28:4
並列篇名 ACCURACY AND MACHINING PERFORMANCE OF A BIAXIAL HYDROSTATIC LATHE
作者 蔡國銘謝忠祐陳奕錦曹堃培
頁次 263-268
關鍵字 液靜壓滑軌鑽石車削次微米工具機hydrostatic sidewaydiamond turningsub-micron machine toolsEIScopusTSCI
出刊日期 201312

中文摘要

本文探討自製雙軸液靜壓車床之運動精度與加工特性,並與Moore超精密車床之加工結果比較。此車床之機座是以花崗岩製作,導軌使用對稱封閉式液靜壓滑軌,油壓供應系統使用伺服馬達泵浦附蓄壓器以穩定供油壓カ,並以線性馬達驅動平台。由精度量測結果顯示X軸雙向定位精度爲1.391 、重複精度爲1.28μm、水平直度爲19.81 μm、垂直直度爲4.5 μm ; Z軸雙向定位精度爲1.345 μm、重複精度爲1.016 μm、水平直度爲5.26 μm、垂直直度爲6.18 μm。另外,切削試驗是針對鋁合金試件,以主軸轉速2000 rpm、進給速率5 mm/mm、切削深度5 μm、刀鼻半徑1.002 mm進行加工。可得平面試件之輪廓精度(PV)爲0.283 μm/42.6 mm、表面粗糙度爲Ra 0.0281 μm ;球面試件之輪廓精度爲0.178 μm/10.8 mm、表面粗糙度爲Ra 0.0255 μm,由此可知,此自製雙軸液靜壓車床可達到次微米的加工精度。

英文摘要

In this study a biaxial hydrostatic lathe was designed and fabricated, and the moving precision and the machining characteristics of the machine were investigated; the results were compared with the data for Moore's ultra-precision lathe. The base of the machine was made of granite and the frame was composed of closed-loop hydrostatic slideways; a servo motor pump with accumulator was used to supply steady hydraulic pressure and the carriage was driven by a linear motor. Results of accuracy measurements indicated that in X-direction the bidirectional positioning accuracy was 1.391 μm, repeatability was 1.28 μm, horizontal straightness was 19.81 μm and vertical straightness was 4.5 μm; in Z-oirection the bidirectional positioning accuracy was 1.345 jam, repeatability was 1.016 μm, horizontal straightness was 5.26 μm and vertical straightness was 6.18 μm. A machining test for aluminum alloy samples was performed using a diamond tool with a nose radius of 1.002 mm, at a spindle speed of 2000 rpm, a feeding rate of 5 mm/min, and a cutting depth of 5 am. For planar samples the form error (PV) was 0.283 μm/42.6 mm and the surface roughness was Ra 0.0281 μm; for spherical samples the form error (PV) was 0.178 μm/10.8 mm, the surface roughness was Ra 0.0255 μm. The results indicate that the biaxial hydrostatic lathe fabricated by the authors can produce samples with sub-micron machining accuracy.

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