裂環共振器為人造光學超穎材料最重要之基本結構之一，在邁向更高頻應用中，三維化的課題則是現階段所遭遇的最大困難點。本研究提出一項簡單的製程架構，結合微影術與乾式蝕刻技術，利用金屬應力自組法，可輕易地製作紅外波段之三維裂環共振器，並透過光譜量測及數值模擬分析，研究電磁波與元件交互作用所顯現之光學特性。

The split ring resonator is one of the most important meta-atom for constructing the artificial photonic metamaterials. For higher frequency applications, the most difficult part is to fabricate the three-dimensional structures. In this study, we demonstrate a simple strategy by utilizing metal-stress self-assembly method to fabricate infrared three-dimensional split ring resonators. This strategy is simply involved lithography and dry etching processes. The electromagnetic properties are characterized through both spectrum experiments and numerical simulations.