運用微熱壓印於聚合物進行微製造是一個具有經濟效益的方法。由於全球競爭的壓力，微元件必須以便宜與很快的速度來研發、製造與導入市場，因此本研究提出一項可運用於微熱壓印之一種簡單與低成本之微特徵模具製作技術，研究結果發現，使用 KA200B 膠膜來固定微齒輪，可以製作出齒型完整之精微矽膠快速模具。運用最佳製作流程，所製作出的快速模具製程轉寫率約為 95 %，微齒輪快速模具之橫向尺寸變異量約為-3 µm 至 2 µm，縱向尺寸變異量約為-1 µm 至2 µm。熱壓印成品之轉寫率可達為 99.15%，熱壓印微齒輪之橫向尺寸變異量約為-2 µm 至 2 µm，縱向尺寸變異量約為-1 µm 至 1 µm。

Micro-hot embossing is a cost-effective approach for polymer-based microfabrication. Micro devices must be more quickly and cheaply developed, manufactured and introduced to the market due to the pressure of global competition. This work demonstrates a technique for producing mold with microfeatures for hot embossing using rapid tooling technology. Silicone rubber mold with complete gear cavity can be made using KA200B foil tape. The transcription rate in the micro-featured mold manufacturing process is about 95% using he optimal manufacturing processes. The dimensional variations of the micro-featured mold in the horizontal and vertical direction are -3 μm to 2 μm and -1 µm to 2 μm, respectively. The transcription rate in the micro-hot embossing molding process is about 99.15%.The dimensional variations of the embossed micro-gear in the horizontal and vertical direction are -2 μm to 2 μm and -1 µm to 1 μm, respectively.