利用聚合物製作具有特徵結構之微元件，微熱壓印技術是一種非常有效率的製程。在精密機械產業，一個最棘手的問題為進行微製造所需模具之製作時間與成本，本研究提出一種可以快速、具經濟效益而且容易加工具有微特徵結構之複合快速模具製作技術。研究結果發現，精微複合快速模具最佳製程為運用矽膠來翻製母矽膠模具，再運用矽膠來翻製公矽膠模具，最後運用公矽膠模具來翻製金屬樹脂快速模具。具有冷卻系統之精微複合快速模具，節省熱壓印之成型週期時間約88.88%。此外，混合快速模具之抗壓強度，明顯大於傳統金屬樹脂之抗壓強度，模具強度提升約1.41 倍。

Micro-hot embossing is a highly effective process for fabricating micro-devices with microfeatures in polymer. One of the most troublesome problems in precision machinery industry is the time and expense needed to produce a precision micro rapid tooling for microfabrication. This study presents an approach of manufacturing a hybrid rapid tooling with microfeatures that is fast, cost-effective and easy to produce. The optimal manufacturing process for fabricating precision micro hybrid rapid tooling was proposed. A cycle time reduction of approximately 88.88% can be obtained when hybrid rapid tooling has a conformal cooling system. Compression strength of precision micro hybrid rapid tooling is about 1.41 times of traditional rapid tooling.