篇名 | 以表面聲波元件為基礎之可撓二氧化碳感測器 |
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卷期 | 5:1 |
並列篇名 | The Design of Mobile & Flexible CO2 Sensor based on the SAW Device |
作者 | 袁有朋 、 林大偉 |
頁次 | 029-032 |
關鍵字 | 二氧化碳感測器 、 氧化鋅薄膜 、 溶 膠-凝膠法 、 CO2 sensor 、 ZnO film 、 Sol-gel method |
出刊日期 | 201503 |
本研究探討利用表面聲波元件為基礎製造 出一個行動可撓之薄膜二氧化碳感測器。首 先運用溶膠-凝膠法(Sol-Gel Method)調製出 氧化鋅(ZnO)溶液並利用旋轉塗佈(Spin Coating)製程進行沉積氧化鋅薄膜並加上三 乙醇胺使薄膜更為強健,繼而利用直接喷墨 印表技術以奈米銀製作電極,最後再將三乙 醇胺以固定的量均勻地塗抹在氧化鋅薄膜 最上方作為感測層,而完成此感測器之製 作。本研究利用向量網路分析儀(Vector Network Analyzer)量測二氧化碳感測器之頻 率響應,結果證明有明顯的感應現象導致訊 號偏移。此二氧化碳感測器具有輕薄可攜及 可撓之特點,未來將改進製程參數以強化頻 率偏移量使增強感測效果。
This study designs and fabricates an inno-vative mobile and flexible CO2 sensor based on the SAW device. The sol-gel method and spin coating are used on the ZnO thin film. In ad-vance, addition of Triethanolamine promotes the robust of ZnO film. Then, the IDT (Inter dig-ital transducer) is designed and fabricated by direct jet-inking technology. Finally, Triethano-lamine film is done as the sensor layer. The center operating frequency of this SAW CO2 sensor is measured by the vector net-work analyzer. The results prove that the signif-icant deviation of frequency resulted from the absorption of CO2 is observed. The characteris-tics of this CO2 sensor is thin, portable and flexi-ble. The improvement of