中央研究院物理研究所耕耘掃描探針顯微術已近 20 年，其間產出高解析、高可靠度與穩定性之超精密奈 米量測、致動核心技術。這些技術可針對不同應用，設計各種奈米級解析度之多軸線性、角度、旋轉量測 與致動元件，應用於其他精密儀器系統之核心。本文將介紹奈米解析度之雷射干涉儀、皮米解析度之光譜 儀與超精密摩擦驅動致動系統。

Institute of Physics, Academia Sinica develops scanning probe microscopy for 2 decades, which generates ultra-high precision measurement and positioning techniques. Those techniques can be custom designed for multi-axes linear, angular, rotational measurement and actuation as a core of precision instruments. In this article, we will introduce spectrometer, laser interferometer, laser auto-collimator systems for precision measurements and nano-scale positioning systems for precision positioning.