本文研究封閉式靜壓軸承使用自補償之工作台的動態特性。於不同的供油壓力、節流 島高度比、潤滑油黏度比等設計參數下，對工作台施加步階力及簡諧力以探討各參數對工 作台動態響應之影響。基於雷諾方程式，以潤滑油流量連續方程式推導出油膜壓力分佈之 計算式；並聯立求解得到油腔之無因次壓力以及軸承工作台之動態響應。

The dynamic characteristics of worktable mounted on closed-type hydrostatic bearings using self-compensation are investigated in this study. For dynamic characteristics, the influences of supply pressure, restriction island height ratio, lubricant viscosity ratio, applied step load and simply-harmonic load on worktable responses are investigated. On the basis of Reynolds equations, the pressure distributions are formulated with the continuity equations of lubricant flow, which are solved simultaneously to give dimensionless pressures of recesses and dynamic responses of bearing's worktable.