本文以合金鋼相變態、仿生材料、光學薄膜、奈米觸媒及半導體磊晶材料顯微結構分析為例，簡述一段原子解析度顯微結構分析之歷程並藉此說明光學顯微鏡、掃描式電子顯微鏡、穿透式電子顯微鏡及像差修正掃描穿透式電子顯微鏡之發展與原理。

A progress of the atomic resolution microstructure characterization has been brief described by means of the microstructure characterizations of phase transformation of alloy steel, bionics materials, optical thin films, nanocatalyst and semiconductor epitaxial materials. The development and principle of optical microscopy, scanning electron microscopy, transmission electron microscopy and aberration-corrected scanning transmission electron microscopy were illustrated.