量測分析技術的發展，不但提升產品可靠度與良率，也加速產業產品研發與 製造。然而，隨著量測需求跨入奈米等級時，量測分析技術面臨了前所未有的挑 戰。由於量測原理及分析軟體不同，不同儀器或量測方法所得的量測結果存在著 一定程度的差異性。因此，因應不同的奈米檢測需求而發展出不同的量測方法， 其間的量測能力的正確性與量測變異，迫切需要完整的量化分析。本文說明如何 將統計方法之變異數分析（Analysis of Variance，ANOVA)應用於奈米領域量測 能力比對，檢定不同類型的量測儀器的量測結果，並藉由ANOVA分析結果，探 討不同儀器或量測方法間的量測一致性。

In order to accelerate new manufacturing processes and product developments, measurement is crucial to increase production yield and obtain better product reliability. However, when the measurement demand is extended to nanoscale, measurement techniques must be developed to meet new challenges. Because of different principles and software used in these techniques, measurement results of different instruments or measurement methods do not agree well with each other to a certain degree. The discrepancy of accuracy and variation of measurement capabilities between different measurement methods are required to be analyzed. This paper describes the application of Analysis of Variance (ANOVA) to analyze the variations and discrepancies in nanoscale measurements based on the results from recent international interlaboratory comparisons. The statistical hypothesis method was applied to test the differences between measurement means of different types of instruments. The consistency of different instruments and measurement methods was then investigated.