運用熱壓印於聚合物進行微製造是一個具有經濟效益的方法。由於全球競爭 的壓力，微元件必須以便宜與很快的速度來研發、製造與導入市場，因此本研究 提出一項可以縮短熱壓印製程脫模時間之混合快速模具製作技術，研究結果發 現，運用紅銅、鋁材以及模具鋼為背襯材料所製作之混合快速模具，如與運用傳 統方法所研製之金屬樹脂熱壓印模具比較，實際提升熱壓印脫模時間效率分別約 為78%、68 %以及50%。運用四種不同背襯材料所製作之快速模具之深度或寬 度之翻製率均可達96%以上，熱壓印之微結構深度與寬度轉寫率均可達93%以 上。

Hot embossing is a cost-effective approach for polymer-based microfabrication. Micro devices must be more quickly and cheaply developed, manufactured and introduced to the market due to the pressure of global competition. This work demonstrates a technique to fabricate hybrid rapid tooling for reducing demolding time during micro-hot embossing molding process. It was found that the demolding time efficiencies for the hybrid rapid tooling produced by the backing materials of copper, aluminum and steel about 78% ' 68 % and 50% can be enhanced compared to that of the traditional rapid tooling. The replication rate exceeding 96% in the hybrid rapid tooling manufacturing process can be reached. The transcription rate exceeding 93% in the micro-hot embossing molding process can be obtained.