斜盤式軸向柱塞泵主要透過柱塞及配流盤間的相互運動，使液壓油於密封缸體內產生容積變化，進而執行吸排油行程。由於柱塞泵具有可調節流量及輸出較大工作壓力等優點，因此廣泛應用於工業界，為常見的液壓動力元件。本文主要探討柱塞泵配流盤表面損傷肇因分析。分析範圍包含：背景資料蒐集、巨觀及微觀觀察、金相與化學組成分析、硬度量測等。分析結果顯示：柱塞泵運作期間，控制液壓油進出口之配流盤處於壓力劇變的狀態。當液壓油壓力劇降至其飽和蒸汽壓時，即開始汽化並產生渦穴氣泡，而當壓力劇升時，壓力將氣泡壓縮並於破裂瞬間，原先環繞氣泡周圍的液壓油同時向內產生噴射流並衝擊配流盤表面造成損傷，不斷循環的結果，最終肇致渦蝕現象發生。

Axial swash plate piston pump is mainly used to perform the suction and discharge of hydraulic oil by creating volume change through mutual movement between the piston and flow distribution plate in a sealed cylinder. Due to the advantages of adjustable flow rate and high working pressure, piston pumps are common hydraulic power components in the industry. This paper focuses on the failure analysis of the damage cause of the flow distribution plate in axial swash plate piston pumps. The scope of analysis includes: background data collection, macroscopic and microscopic observation, metallographic analysis, chemical composition analysis, hardness measurement, etc. The analysis results show that the flow distribution plate controlling the inlet and outlet of the hydraulic oil was in a state of rapid pressure change during the operation. When the hydraulic oil pressure dropped to its saturated vapor pressure, vaporization occurred and bubbles were generated. As the pressure rised sharply, the pressure compressed the bubble and generated a micro-jet in the hydraulic oil when the bubble bursted. The micro-jet then damaged the surface of the flow distribution plate. The result of the continuous cycle eventually led to the cavitation phenomenon.