透過微機械諧振器之諧振頻率隨著外在環境變化而偏移的效果作為感測器使用，是目前廣泛應用的感測機制之一，並已用於質量、力量與電壓計等感測應用。有別於傳統諧振式微機械感測元件如懸臂梁結構，本文使用基於調諧質量阻尼結構之多維度諧振器做為質量感測元件，以此來達成更高的感測靈敏度。本文將依序介紹調諧質量阻尼微機械感測器的物理模型、量測架設以及實驗結果。

Micromechanical resonators, of which their resonance frequencies change in response to environmental perturbations, could be used as sensors. To date, Resonant-type sensors are the most widely adopted sensing mechanism in numerous application fields, including mass sensors, force sensors, electrometers, etc. Compared to regular micromechanical sensing devices, i.e., cantilever beam resonators, this article uses a tuned-mass-damper-based resonator for mass sensing applications to achieve higher sensitivity. This article is organized as follows: (1) physical models, (2) measurement set-up, and (3) measurement results.