在氧化銦錫玻璃基板上生長高密度且排列良好之氧化鋅奈米結構和吸附金奈米顆粒被用作氣感材料，通過簡單的水熱法，在不同的直流濺鍍系統沉積時間（0 s、30 s），金奈米顆粒吸附的奈米柱陣列成功地在基板上生長，製作為氣體感測元件。透過儀器的分析 [掃描式電子顯微鏡、能量色散X射線譜、X射線繞射儀、光致發光儀、穿透式電子顯微鏡圖]，觀察其奈米結構的表面型態、材料的結晶度、光學特性以及元素含量的分布，證實金奈米粒子成功吸附在奈米結構上，在元件的部分，有無金奈米粒子吸附的氧化鋅奈米柱對甲醇1000 ppm響應值分別為63%與41%，並且在工作溫度150°C和甲醇濃度為1000 ppm下呈現出良好的特性，進一步證實金奈米粒子不但可以有效的提升感測器的靈敏度也增強了對感測元件的穩定度。

High-density and well-aligned zinc oxide (ZnO) nanostructures and adsorbed gold (Au) nanoparticles grown on indium tin oxide (ITO) glass substrates were used as gas materials. Through a simple hydrothermal method and at different deposition times of the DC sputtering system (0 s、30 s), the nanorod (NR) arrays adsorbed by Au nanoparticles were successfully grown on the substrate to produce gas-sensing devices. Through instrument analysis [scanning electron microscope (SEM), energy-dispersive spectroscopy (EDS), X-ray diffraction (XRD), photoluminescence (PL), transmission electron microscopy (TEM)], the surface morphology of nanostructure, crystallinity of the material, optical property, and distribution of element content were observed, confirming the successful adsorption of Au nanoparticles on the nanostructure. In the device section, the response values of ZnO nanorods with or without Au nanoparticles adsorption to 1000 ppm methanol were 63% and 41%, respectively, and showed good characteristics at operating temperature of 150 °C and methanol concentration of 1000 ppm. This further confirms that Au nanoparticles can not only effectively improve the sensitivity of the sensor but also enhance the stability of the sensing device.