微型加熱器的開發宗旨為提高加熱效率、降低耗能、縮小尺寸、更快的響應時間以及精確的溫度控制。研究主要著重在底部式微型加熱結合氣體感測應用之微型加熱器的設計與製造，以分析耗能和溫度分佈為主要目的，並利用此元件進行開發與模擬。模擬4種不同幾何設計的加熱電極，以此來比較出哪種設計耗能較低，並且以微機電技術製程來研發。

Microheaters are developed for higher conversion rates of input power to operating heat, lower energy consumption, faster response times, precise temperature control and in smaller size. This research mainly focuses on the design and manufacture of a micro-heaters combined with bottom heating and gas sensing applications. Along with the main purpose of analyzing energy consumption, temperature distribution and using this component for development and simulation. Simulation comparison of 4 heating electrodes with different geometric designs are compared for less energy consumption design and are developed using micro-electromechanical technology processes.